News / Articles

Stents to treat various blockages in the human body can themselves become blocked, but a new sensor developed at the University of Michigan for stents that are used in the bile duct may one day help doctors detect and treat stent blockages early, helping keep patients healthier.

Researchers at the University of Michigan, led by Khalil Najafi and funded by DARPA, have presented a paper at the 7th IEEE International Symposium on Inertial Sensors & Systems on a new type of of gyroscope called a precision shell integrating (PSI) gyroscope, which the authors say is “10,000 times more accurate but only 10 times more expensive than gyroscopes used in your typical cell phone.”

CubeWorks, founded by the team at University of Michigan that developed the Michigan Micro Mote (M3), the worlds smallest computer, has been flying under the radar since late in 2013. This startup company specializes in the worlds smallest and lowest-power sensing technology. With its first outside funding from Intel, the CEO of CubeWorks is now looking two years into the future, when he hopes to be manufacturing millimeter-scale computing devices for their first customers.

Researchers are exploring the fundamental capabilities of remote sensing through a program that aims to create theoretical models and tools for future remote sensing of ice and snow. This research, directed by Kamal Sarabandi, Rufus S. Teesdale Professor of Engineering, could feed into the development of new sensors for a variety of remote sensing applications.
“The idea of this program is to look into the future,” said Prof. Sarabandi, “determine what new types of measurement can be done remotely, and develop the science and theory for what is and isn’t possible.” Based on the theory, researchers can determine the best ways to monitor the earth, particularly ice and snow levels which have serious ecological consequences.
Prof. Sarabandi has long been a strong proponent for pursuing this type of theoretical research. “Everything we know now was begun 10-20 years ago,” he explained. “You have to first figure out what can and can’t be done before you develop the sensors and too

WIMS2 researchers, Prof. Khalil Najafi and doctoral student Stacey Tang, have developed a new type of multi-axis, capacitive, MEMS accelerometer made from thick silicon. The new accelerometer can achieve sub-µg resolution (<1µg/vHz) and high areal sensitivity (1pF/g per 1mm2). It has a 3D, vertical, biomimetic hair-like structure, and is microfabricated from a thick silicon wafer using a new 2-gap microfabrication process that is also compatible with CMOS device integration.

The novel process circumvents some of the stringent requirements on deep reactive ion etching (DRIE) when etching thick (>500µm) layers. It enables the fabrication of large proof-mass (1mm tall, >2.33 milligram/mm2), high aspect-ratio (HAR) narrow sense gaps (<3 µm wide, >250 µm tall), and a large sense/feedback electrode area (>250 µm tall). The result is a MEMS accelerometer with an area smaller than any previous precision accelerometers with similar perf

Prof. Somin Eunice Lee, assistant professor of Electrical and Computer Engineering, was awarded an NSF CAREER award for her research project, “Engineering Plasmonic Nanoantenna Architectures for Efficient Nuclear Delivery.”

Prof. Xudong (Sherman) Fan received this honor. Each year, SPIE promotes members as new Fellows of the Society. Fellows are Members of distinction who have made significant scientific and technical contributions in the multidisciplinary fields of optics, photonics, and imaging. They are honored for their technical achievement, for their service to the general optics community, and to SPIE in particular.

Prof. Kamal Sarabandi received the Stephen S. Attwood Award, for “extraordinary achievement in teaching, research, service, and other activities that have brought distinction to the College and University.”

Prof. Xudong (Sherman) Fan received this award which is bestowed upon a College of Engineering Faculty member who has demonstrated sustained excellence in research and related scholarly activities.

Prof. Anthony Grbic received the award for inspirational teaching, dedicated mentoring of graduate students, and innovative research in metamaterials and wireless power transfer.

Prof. Mina Rais-Zadeh received the award for outstanding contributions to research in high frequency MEMS and piezoelectric semiconductor transducers, and for excellence in teaching and service.

Prof. Euisik Yoon Prof. Euisik Yoon "For outstanding contributions to micro electro mechanical systems (MEMS), and innovative research and leadership in biomedical microsystems and neurotechnology."
Euisik and other award winners will be recognized, along with other faculty awards and accomplishments from the past year, at the upcoming Faculty Recognition Dinner on Saturday, February 11th at 6:00 pm in the Rogel Ballroom at the Michigan Union.

Electrical engineer and Google Glass creator Babak Parviz is widely recognized for revolutionizing communication technology through advances in optics, self-assembly, and miniaturized electronics. Dr. Parviz, who lives in Seattle, holds a B.S. degree in electrical engineering from Sharif University of Technology in Tehran and a B.A. in literature from the University of Washington (UW). He studied micro-electro-mechanical systems at the University of Michigan, where he earned a M.S.E degree (1997) and Ph.D. (2001) in electrical engineering and a M.S. degree (2001) in physics. He completed a postdoctoral fellowship at Harvard University in chemistry and chemical biology and developed self-assembly techniques to fabricate nano-scale devices and systems as a UW faculty member. He continues to serve as an affiliate professor in UW’s Department of Electrical Engineering. In 2010, two years after developing a bionic contact lens prototype, he joined Google, where he initiated and led the Glas

Azadeh Ansari, Electrical Engineering and Computer Science, won the ProQuest Distinguished Dissertation Award which recognizes exceptional and unusually interesting work produced by doctoral students.

Prof. Becky Peterson received the NSF CAREER Award for research in Amorphous Semiconductors for Next Generation Electronics.

Prof. Michael Flynn has received a Faculty Recognition Award for his accomplishments in research, teaching, and service to the University. Prof. Flynn is one of the world's premier scholars in the area of analog and mixed-signal integrated circuits and systems, analog-to-digital conversion (ADC), and other interface circuits. His pioneering research and designs have improved the performance and energy efficiency of analog-digital interfaces and transformed the field.

A new device for studying tumor cells can trap 10,000 individual cells in a single chip. The technique, developed by Prof. Euisik Yoon's group, could one day help screen potential cancer treatments based on an individual patient's tumor and help researchers better understand so-called cancer stem cells. It also shed light on a controversy: are large cells or small cells more likely to be cancer stem cells?

Prof. David Blaauw was presented with the University Research Award by the Semiconductor Industry Association (SIA), in consultation with Semiconductor Research Corporation (SRC), in recognition of his outstanding contributions to semiconductor research in the area of design research. He was presented with the award by the SIA Board on September 21, 2016 in San Jose, CA.

Profs. David Blaauw and David Wenzloff are designing millimeter-scale ultra-low-power sensing systems that can be injected into the body through a syringe. Unlike other radios of this size, these new devices are able to broadcast through the human body to an external receiver.

A pilot program led by Prof. Euisik Yoon will regularly bring together researchers with complementary expertise from different universities to collaborate on advancing research that may lead to a better understanding of the human brain and diseases that affect it. Yoon has been leading a key development of the Michigan Probe, a revolutionary tiny solid-state microsystem developed at U-M that can be used to probe the inner workings of the brain.

Professor Mina Rais-Zadeh has been awarded the 2015 IEEE Sensors Council Technical Achievement Award, "For pioneering research in sensors technology: adaptable nano/micro-electromechanical systems (N/MEMS)." This early career award honors individuals with outstanding technical contributions within the scope of the IEEE Sensors Council.

A "dream team" of experts in sensors, electronics, data analysis and neuroscience has been awarded a $5 million grant to help unravel the mysteries of the brain and cross-train an international group of neuroscientists and engineers. The project is directed by Prof. Euisik Yoon, and includes experts and partner institutions around the world.

As Corporate Outreach Directors for the WIMS2 Center, entrepreneurs and U-M alums Sassan Teymouri and Shahin Hedayat are helping to introduce its wireless integrated microsensing and systems technology to Silicon Valley and strengthen the Centers ties to industry.

The Center for Wireless Integrated MicroSensing and Systems is pleased to welcome Amazon.com as a new Member Partner.

Professor Khalil Najafi, a co-founder of WIMS, has received the 2015 IEEE Daniel E. Noble Award for Emerging Technologies, "For leadership in micro-electro-mechanical systems (MEMS), technologies, and devices and for seminal contributions to inertial devices and hermetic wafer-level packaging."The IEEE Daniel E. Noble Award for Emerging Technologies is one of IEEE's Technical Field Awards, which are among the highest awards given by IEEE. Khalil is being recognized as a worldwide leader for nearly 30 years in the research and development of micromachined sensors, microelectromechanical systems (MEMS) and integrated microsystems. His research has translated into 2 startup companies, which he also co-founded."

The Center for Wireless Integrated MicroSensing and Systems is pleased to welcome Hutchinson S.A, and Tyco International, Ltd. as new Member Partners.

The sixteenth in the series of Hilton Head Workshops on the science and technology of solid-state sensors, actuators, and microsystems was held on June 8 - 12, 2014. WIMS2 faculty and students presented seven papers.

The Center for Wireless Integrated MicroSensing and Systems is pleased to welcome Philips Electronics as a new Member Partner.

Prof. Mina Rais-Zadeh received a 2014 Young Investigator Award from the Office of Naval Research (ONR) for her research project, Acoustic Phonons and Their Interactions with Electrons in Gallium Nitride Ultra-fast Ultra-scaled Resonators.

Together with wireless communications, the Internet, and cloud computing and storage, a new world awaits us for smarter medical, industrial, transportation, smart building and structure, agriculture, and geophysical applications.

MEMS Research Recognized with Best Poster Award at 2013 Transducers Conference

Workshop to Chart the Future of Nano and Micro Manufacturing

Workshop on Nano/Micro Manufacturing May 22 - 23, 2013 Ford Motor Company Conference and Event Center, Dearborn, Michigan

Professor Dennis Sylvester Receives U-M Faculty Recognition Award

David Blaauw and Dennis Sylvester Named Top Authors by ISSCC

David Wentzloff Receives CAREER Award for Research in Energy-Autonomous Systems

Mina Rais-Zadeh Receives NASA Early Career Grant to Develop Technology Needed for PicoSatellites

Think Outside the Chip: MEMS-Based Systems Solutions

Technology Clusters and Their Role in the Commercialisation of Micro and Nano Systems

Wireless Integrated MicroSensing and Systems (WIMS2) in California

Micro and High Precision Technology Event declared a Success

Benefits to Working with a University Research Lab in the Post Recession Era: How Universities and Industry can Partner for Success

Microfabricated Passive Vapor Preconcentrator/Injector Designed for Microscale Gas Chromatography

MEMS-Based Systems Solutions Emerge For Analytical Instruments

Crossing Over: Tackling Technology Transfers

Wireless Sensor Network Research Makes Hot Tech List

Blaauw-Sylvester: EE Times 20 hot technologies for 2012

Professor David Blaauw Elected Fellow of the IEEE

Mina Rais-Zadeh Receives 2011 EDS Early Career Award
10/06/2011

Micro Energy Harvesters Will Make Cyborg Insects Unstoppable
09/05/2011

A Minimally-Invasive Brain Implant to Translate Thoughts Into Movement
06/16/2011

Most Powerful Millimeter-Scale Energy Harvester Generates Electricity From Vibrations
04/25/2011

New Technologies Usher in the Millimeter-Scale Computing Era
02/23/2011

Why MEMS-Based System Solutions?
02/01/2011